Theory on High-Vacuum Planar Magnetron Discharge

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Theory on High-Vacuum Planar Magnetron Discharge

Call No. (NDL): Z53-A375
Bibliographic ID of National Diet Library: 4176239

Material type: 記事

Author: Tsutomu Miuraほか

Publisher: Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

Publication date: 1997-02

Material Format: Digital

Journal name: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 36(2) 1997.02

Publication Page: p.787～791

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Detailed bibliographic record

Summary, etc.：: A theory on high-vacuum planar magnetron discharge for the wide range of E a/B A>2.0× 106/n V/(m· T) has been develop...

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Material Type: 記事
Title: Theory on High-Vacuum Planar Magnetron Discharge
Author/Editor: Tsutomu Miura
Tastuo Asakaki
Author Heading: Tsutomu Miura
Tastuo Asakaki
Periodical title: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue: 36(2) 1997.02
Volume: 36
Issue: 2
Pages: 787～791
Publication date of volume/issue (W3CDTF): 1997-02
ISSN (Periodical Title): 0021-4922
ISSN-L (Periodical Title): 0021-4922
Publication (Periodical Title): Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: ZM35
Target Audience: 一般
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌
https://dl.ndl.go.jp/collections/A00002
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象
Availability of remote photoduplication service: 可
Holding library: 国立国会図書館
Call No.: Z53-A375
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/11196190
https://dl.ndl.go.jp/pid/11196190
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4176239
http://id.ndl.go.jp/bib/4176239
Bibliographic Record Category (NDL): 632