小型SR光ビームラインを用いたPMMAの高アスペクト比X線リソグラフィーの検討

Journal name: 立命館大学理工学研究所紀要 = Memoirs of the Institute of Science & Engineering / 立命館大学理工学研究所編 (通号 55) 1996

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Material Type: 記事
Title: 小型SR光ビームラインを用いたPMMAの高アスペクト比X線リソグラフィーの検討
Author/Editor: 保坂誠
張延平
上野洋他
Author Heading: 保坂誠
張延平
上野洋
Periodical title: 立命館大学理工学研究所紀要 = Memoirs of the Institute of Science & Engineering / 立命館大学理工学研究所編
No. or year of volume/issue: (通号 55) 1996
Sequential issue number: 55
Pages: 155～162
Publication date of volume/issue (W3CDTF): 1996
ISSN (Periodical Title): 0370-4254
ISSN-L (Periodical Title): 0370-4254
Publication (Periodical Title): 草津 : 立命館大学理工学研究所
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM2
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z14-189
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4182623
http://id.ndl.go.jp/bib/4182623
Bibliographic Record Category (NDL): 632