サブクォータミクロンロジックLSI用高信頼性銅配線の開発
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- Material Type
- 記事
- Author/Editor
- 五十嵐 泰史伊東 敏雄
- Periodical title
- 沖電気研究開発
- No. or year of volume/issue
- 64(2) 1997.04
- Volume
- 64
- Issue
- 2
- Pages
- 67～72
- Publication date of volume/issue (W3CDTF)
- 1997-04