Characteristics of the Electric Capacitance and Dielectric Loss of the Thermal Oxide of Porous Silicon Formed Using Highly Phosphorus Diffused Silicon
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- Material Type
- 記事
- Author/Editor
- Yoshinobu AritaKunihiro Kuranari
- Author Heading
- Periodical title
- Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
- No. or year of volume/issue
- 36(3A) 1997.03
- Volume
- 36
- Issue
- 3A
- Pages
- 1035～1039
- Publication date of volume/issue (W3CDTF)
- 1997-03