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イオンビームスパッタ法による窒素イオン衝撃を用いたFeN薄膜の作製

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イオンビームスパッタ法による窒素イオン衝撃を用いたFeN薄膜の作製

Call No. (NDL)
Z15-398
Bibliographic ID of National Diet Library
4192956
Material type
記事
Author
岩坪 聡ほか
Publisher
東京 : 日本磁気学会
Publication date
1997-04
Material Format
Digital
Journal name
日本応用磁気学会誌 21(4-2) 1997.04
Publication Page
p.437~440
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Detailed bibliographic record

Summary, etc.:

The relationship between the structure and magnetic properties of FeN films and the deposition conditions in ion beam sputtering with nitrogen bombard...

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Digital

Material Type
記事
Author/Editor
岩坪 聡
高橋 隆一
Periodical title
日本応用磁気学会誌
No. or year of volume/issue
21(4-2) 1997.04
Volume
21
Issue
4-2
Pages
437~440
Publication date of volume/issue (W3CDTF)
1997-04