Self-Aligned Passivation Technology for Copper Interconnection Using Copper-Aluminum Alloy (Solid State Devices and Materials)

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Self-Aligned Passivation Technology for Copper Interconnection Using Copper-Aluminum Alloy(Solid State Devices and Materials)

Call No. (NDL): Z53-A375
Bibliographic ID of National Diet Library: 4196664

Material type: 記事

Author: Nobuyoshi Awayaほか

Publisher: Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

Publication date: 1997-03

Material Format: Digital

Journal name: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 36(3B) 1997.03

Publication Page: p.1548～1553

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Summary, etc.：: A self-aligned passivation procedure for fabricating copper interconnection has been developed using Al-Cu alloy formation. With annealing at 350<SUP>...

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Material Type: 記事
Title: Self-Aligned Passivation Technology for Copper Interconnection Using Copper-Aluminum Alloy
Author/Editor: Nobuyoshi Awaya
Toshio Kobayashi
Series Title: Solid State Devices and Materials
Author Heading: Nobuyoshi Awaya
Toshio Kobayashi
Periodical title: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue: 36(3B) 1997.03
Volume: 36
Issue: 3B
Pages: 1548～1553
Publication date of volume/issue (W3CDTF): 1997-03
ISSN (Periodical Title): 0021-4922
ISSN-L (Periodical Title): 0021-4922
Publication (Periodical Title): Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: ZM35
Target Audience: 一般
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌
https://dl.ndl.go.jp/collections/A00002
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象
Availability of remote photoduplication service: 可
Holding library: 国立国会図書館
Call No.: Z53-A375
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/11226552
https://dl.ndl.go.jp/pid/11226552
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4196664
http://id.ndl.go.jp/bib/4196664
Bibliographic Record Category (NDL): 632