雑誌ながれ : 日本流体力学会誌
Volume number16(1)-16(6) 19970200-19971200
ArticleCVDのシミュレーシ...

CVDのシミュレーション

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CVDのシミュレーション

Call No. (NDL)
Z14-911
Bibliographic ID of National Diet Library
4203298
Material type
記事
Author
佐藤 恒之ほか
Publisher
東京 : 日本流体力学会
Publication date
1997-04
Material Format
Paper
Journal name
ながれ : 日本流体力学会誌 = Nagare : journal of Japan Society of Fluid Mechanics 16(2) 1997.04
Publication Page
p.110～119
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Paper

Material Type
記事
Title
CVDのシミュレーション
Author/Editor
佐藤 恒之
秋山 泰伸
Author Heading
佐藤 恒之
秋山 泰伸
Periodical title
ながれ : 日本流体力学会誌 = Nagare : journal of Japan Society of Fluid Mechanics
No. or year of volume/issue
16(2) 1997.04
Volume
16
Issue
2
Pages
110～119
Publication date of volume/issue (W3CDTF)
1997-04