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雑誌新日鉄技報
Volume number(363)
ArticleSIMOXウェーハ(...

SIMOXウェーハ(酸素イオン注入により絶縁分離したシリコンウェーハ)の開発 (新素材小特集)

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SIMOXウェーハ(酸素イオン注入により絶縁分離したシリコンウェーハ)の開発(新素材小特集)

Call No. (NDL)
Z17-328
Bibliographic ID of National Diet Library
4217148
Material type
記事
Author
日月 応治
Publisher
東京 : 新日本製鐵技術開発本部
Publication date
1997-04
Material Format
Digital
Journal name
新日鉄技報 / 新日本製鐡株式会社技術開発本部, 技術開発企画部 編 (通号 363) 1997.04
Publication Page
p.15～20
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Digital

Material Type
記事
Title
SIMOXウェーハ(酸素イオン注入により絶縁分離したシリコンウェーハ)の開発
Author/Editor
日月 応治
Series Title
新素材小特集
Author Heading
日月 応治
Periodical title
新日鉄技報 / 新日本製鐡株式会社技術開発本部, 技術開発企画部 編
No. or year of volume/issue
(通号 363) 1997.04
Sequential issue number
363
Pages
15～20
Publication date of volume/issue (W3CDTF)
1997-04