Charge Dissipation on Chemically Treated Thin Silicon Oxide in Air

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Charge Dissipation on Chemically Treated Thin Silicon Oxide in Air

Call No. (NDL)
Z53-A375
Bibliographic ID of National Diet Library
4277712
Material type
記事
Author
Takayuki Uchihashiほか
Publisher
Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Publication date
1997-06
Material Format
Digital
Journal name
Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 36(6A) 1997.06
Publication Page
p.3755~3758
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Detailed bibliographic record

Summary, etc.:

We studied the microscopic charge dissipation of densely contact-electrified charges on silicon oxides with and without a trimethylsilyl (TMS) organos...

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Bibliographic Record

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Digital

Material Type
記事
Author/Editor
Takayuki Uchihashi
Akihiko Nakano
Tohru Ida 他
Periodical title
Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue
36(6A) 1997.06
Volume
36
Issue
6A
Pages
3755~3758
Publication date of volume/issue (W3CDTF)
1997-06