形状記憶合金駆動素子を用いた大口径コンパクトゲートバルブ

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Material Type: 記事
Title: 形状記憶合金駆動素子を用いた大口径コンパクトゲートバルブ
Author/Editor: 西川雅弘
吉川和博
Author Heading: 西川雅弘
吉川和博
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 40(8) 1997.08
Volume: 40
Issue: 8
Pages: 643～649
Publication date of volume/issue (W3CDTF): 1997-08
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4293187
http://id.ndl.go.jp/bib/4293187
Bibliographic Record Category (NDL): 632