磁気センサ用半導体およびGMRの技術動向 (特集「センサ・アクチュエータ用無機機能性薄膜プロセス技術」)

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磁気センサ用半導体およびGMRの技術動向(特集「センサ・アクチュエータ用無機機能性薄膜プロセス技術」)

Call No. (NDL)
Z16-B380
Bibliographic ID of National Diet Library
4304106
Material type
記事
Author
杉山 佳延
Publisher
東京 : 電気学会
Publication date
1997-09
Material Format
Paper
Journal name
電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines 117(10) 1997.09
Publication Page
p.492~496
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Paper Digital

Material Type
記事
Author/Editor
杉山 佳延
Author Heading
Periodical title
電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
No. or year of volume/issue
117(10) 1997.09
Volume
117
Issue
10
Pages
492~496