雑誌表面技術
Volume number48(9)-48(12) 19970900-19971200
Article半導体の最新動向と真...

半導体の最新動向と真空装置 (特集 マルチメディア時代における真空装置と薄膜応用)

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半導体の最新動向と真空装置

(特集 マルチメディア時代における真空装置と薄膜応用)

Call No. (NDL)
Z17-291
Bibliographic ID of National Diet Library
4334588
Material type
記事
Author
-
Publisher
東京 : 表面技術協会
Publication date
1997-11
Material Format
Paper
Journal name
表面技術 = Journal of the Surface Finishing Society of Japan 48(11) 1997.11
Publication Page
p.1043～1058
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Paper

Material Type
記事
Title
半導体の最新動向と真空装置
Series Title
特集 マルチメディア時代における真空装置と薄膜応用
Periodical title
表面技術 = Journal of the Surface Finishing Society of Japan
No. or year of volume/issue
48(11) 1997.11
Volume
48
Issue
11
Pages
1043～1058
Publication date of volume/issue (W3CDTF)
1997-11
ISSN (Periodical Title)
0915-1869