単結晶シリコンインゴットの高能率貫通穴放電加工に関する研究

Journal name: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編 63(12) 1997.12

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Material Type: 記事
Title: 単結晶シリコンインゴットの高能率貫通穴放電加工に関する研究
Author/Editor: 宇野義幸
岡田晃
岡本康寛
Author Heading: 宇野義幸
岡田晃
岡本康寛
Periodical title: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編
No. or year of volume/issue: 63(12) 1997.12
Volume: 63
Issue: 12
Pages: 1725～1729
Publication date of volume/issue (W3CDTF): 1997-12
ISSN (Periodical Title): 0912-0289
ISSN-L (Periodical Title): 0912-0289
Publication (Periodical Title): 東京 : 精密工学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN12
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-466
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4353085
http://id.ndl.go.jp/bib/4353085
Bibliographic Record Category (NDL): 632