遮へいマスクを用いた高品位レーザアブレーション成膜法(エクリプス法)

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遮へいマスクを用いた高品位レーザアブレーション成膜法(エクリプス法)

Call No. (NDL)
Z16-795
Bibliographic ID of National Diet Library
4353422
Material type
記事
Author
立木 実ほか
Publisher
東京 : 電気学会
Publication date
1997-11
Material Format
Paper
Journal name
電気学会論文誌. C, 電子・情報・システム部門誌 = IEEJ transactions on electronics, information and systems 117(12) 1997.11
Publication Page
p.1856~1861
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Paper

Material Type
記事
Author/Editor
立木 実
小林 猛
Author Heading
Periodical title
電気学会論文誌. C, 電子・情報・システム部門誌 = IEEJ transactions on electronics, information and systems
No. or year of volume/issue
117(12) 1997.11
Volume
117
Issue
12
Pages
1856~1861
Publication date of volume/issue (W3CDTF)
1997-11