電解法によるECD用イリジウム酸化物薄膜の作製(小特集/湿式法による化合物薄膜の作製・構造と物性)

Journal name: 表面技術 = Journal of the Surface Finishing Society of Japan 49(1) 1998.01

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Material Type: 記事
Title: 電解法によるECD用イリジウム酸化物薄膜の作製
Author/Editor: 吉野隆子
Series Title: 小特集/湿式法による化合物薄膜の作製・構造と物性
Author Heading: 吉野隆子
Periodical title: 表面技術 = Journal of the Surface Finishing Society of Japan
No. or year of volume/issue: 49(1) 1998.01
Volume: 49
Issue: 1
Pages: 20～24
Publication date of volume/issue (W3CDTF): 1998-01
ISSN (Periodical Title): 0915-1869
ISSN-L (Periodical Title): 0915-1869
Publication (Periodical Title): 東京 : 表面技術協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZP41
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z17-291
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4367216
http://id.ndl.go.jp/bib/4367216
Bibliographic Record Category (NDL): 632