電解法によるECD用...

電解法によるECD用イリジウム酸化物薄膜の作製 (小特集/湿式法による化合物薄膜の作製・構造と物性)

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電解法によるECD用イリジウム酸化物薄膜の作製(小特集/湿式法による化合物薄膜の作製・構造と物性)

Call No. (NDL)
Z17-291
Bibliographic ID of National Diet Library
4367216
Material type
記事
Author
吉野 隆子
Publisher
東京 : 表面技術協会
Publication date
1998-01
Material Format
Paper
Journal name
表面技術 = Journal of the Surface Finishing Society of Japan 49(1) 1998.01
Publication Page
p.20~24
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Paper Digital

Material Type
記事
Author/Editor
吉野 隆子
Author Heading
Periodical title
表面技術 = Journal of the Surface Finishing Society of Japan
No. or year of volume/issue
49(1) 1998.01
Volume
49
Issue
1
Pages
20~24