Formation of Carbon-Related Defects During the Carbon-Enhanced Annihilation of Thermal Donors in Silicon
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- Material Type
- 記事
- Author/Editor
- Yoichi KamiuraTakashi MaedaYoshifumi Yamashita 他
- Author Heading
- Periodical title
- Japanese journal of applied physics. Pt. 2, Letters
- No. or year of volume/issue
- 37(2A) 1998.02
- Volume
- 37
- Issue
- 2A
- Pages
- L101～104
- Publication date of volume/issue (W3CDTF)
- 1998-02