プロセス用の新しい高...

プロセス用の新しい高密度プラズマの生成と診断(4)磁気中性線放電(NLD)プラズマ

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プロセス用の新しい高密度プラズマの生成と診断(4)磁気中性線放電(NLD)プラズマ

Call No. (NDL)
Z15-8
Bibliographic ID of National Diet Library
4434923
Material type
記事
Author
陳 巍ほか
Publisher
名古屋 : プラズマ・核融合学会編集委員会
Publication date
1998-03
Material Format
Digital
Journal name
プラズマ・核融合学会誌 = Journal of plasma and fusion research / プラズマ・核融合学会編集委員会 編 74(3) 1998.03
Publication Page
p.258~265
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Digital

Material Type
記事
Author/Editor
陳 巍
林 俊雄
伊藤 正博 他
Periodical title
プラズマ・核融合学会誌 = Journal of plasma and fusion research / プラズマ・核融合学会編集委員会 編
No. or year of volume/issue
74(3) 1998.03
Volume
74
Issue
3
Pages
258~265
Publication date of volume/issue (W3CDTF)
1998-03