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MRヘッドギャップ用アルミナ膜の検討

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MRヘッドギャップ用アルミナ膜の検討

Call No. (NDL)
Z15-398
Bibliographic ID of National Diet Library
4458017
Material type
記事
Author
斎藤 美紀子ほか
Publisher
東京 : 日本磁気学会
Publication date
1998-04
Material Format
Digital
Journal name
日本応用磁気学会誌 22(4-2) 1998.04
Publication Page
p.257~260
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Detailed bibliographic record

Summary, etc.:

The insulating properties, internal stress, and film structure of Si-O-added Al-O films, and their etching characteristics when immersed in water, wer...

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Bibliographic Record

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Digital

Material Type
記事
Author/Editor
斎藤 美紀子
鈴木 富士夫
横田 均 他
Periodical title
日本応用磁気学会誌
No. or year of volume/issue
22(4-2) 1998.04
Volume
22
Issue
4-2
Pages
257~260
Publication date of volume/issue (W3CDTF)
1998-04