New Insight into the Degradation Mechanism of Nitride Spacer with Different Post-Oxide in Submicron LDD n-MOSFET′s

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New Insight into the Degradation Mechanism of Nitride Spacer with Different Post-Oxide in Submicron LDD n-MOSFET′s

Call No. (NDL): Z53-A375
Bibliographic ID of National Diet Library: 4473543

Material type: 記事

Author: C.M. Yihほか

Publisher: Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

Publication date: 1998-03

Material Format: Digital

Journal name: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 37(3B) 1998.03

Publication Page: p.1035～1040

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Detailed bibliographic record

Summary, etc.：: In this paper, the hot carrier degradation mechanisms in lightly-doped drain (LDD) n-MOS devices with silicon nitride spacer have been investigated. A...

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Material Type: 記事
Title: New Insight into the Degradation Mechanism of Nitride Spacer with Different Post-Oxide in Submicron LDD n-MOSFET′s
Author/Editor: C.M. Yih
C.L. Wang
Steve S. Chung 他
Author Heading: C.M. Yih
C.L. Wang
Steve S. Chung
Periodical title: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue: 37(3B) 1998.03
Volume: 37
Issue: 3B
Pages: 1035～1040
Publication date of volume/issue (W3CDTF): 1998-03
ISSN (Periodical Title): 0021-4922
ISSN-L (Periodical Title): 0021-4922
Publication (Periodical Title): Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: ZM35
Target Audience: 一般
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌
https://dl.ndl.go.jp/collections/A00002
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象
Availability of remote photoduplication service: 可
Holding library: 国立国会図書館
Call No.: Z53-A375
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/11226569
https://dl.ndl.go.jp/pid/11226569
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4473543
http://id.ndl.go.jp/bib/4473543
Bibliographic Record Category (NDL): 632