シリコンの表面プラズマ処理と表面状態

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Material Type: 記事
Title: シリコンの表面プラズマ処理と表面状態
Author/Editor: 梅津郁朗
小浜芳春
青木かおり他
Author Heading: 梅津郁朗
小浜芳春
青木かおり
Periodical title: 甲南大学紀要. 理学編 / 甲南大学編
No. or year of volume/issue: 45(1) 1998
Volume: 45
Issue: 1
Pages: 69～76
Publication date of volume/issue (W3CDTF): 1998
ISSN (Periodical Title): 0452-4160
ISSN-L (Periodical Title): 0452-4160
Publication (Periodical Title): 神戸 : 甲南大学
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM2
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z14-125
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4521555
http://id.ndl.go.jp/bib/4521555
Bibliographic Record Category (NDL): 632