0.1μm以下のレジストプロセス(特集 EUV基盤技術とその応用の現状)

Journal name: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編 64(7) 1998.07

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Material Type: 記事
Title: 0.1μm以下のレジストプロセス
Author/Editor: 小川太郎
Series Title: 特集 EUV基盤技術とその応用の現状
Author Heading: 小川太郎
Periodical title: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編
No. or year of volume/issue: 64(7) 1998.07
Volume: 64
Issue: 7
Pages: 1004～1007
Publication date of volume/issue (W3CDTF): 1998-07
ISSN (Periodical Title): 0912-0289
ISSN-L (Periodical Title): 0912-0289
Publication (Periodical Title): 東京 : 精密工学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN12
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-466
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4522557
http://id.ndl.go.jp/bib/4522557
Bibliographic Record Category (NDL): 632