Planalization of Film Deposition and lmprovement of Channel Structure for Fabrication of Anti-Resonant Reflecting Optical Waveguide Type X-crossing Vertical Coupler Filter
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- Material Type
- 記事
- Author/Editor
- Wugen PanSai Tak ChuShinya Sato
- Author Heading
- Periodical title
- Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
- No. or year of volume/issue
- 37(6B) 1998.06
- Volume
- 37
- Issue
- 6B
- Pages
- 3713～3717
- Publication date of volume/issue (W3CDTF)
- 1998-06