Effect of Surface Roughness on Room-Temperature Wafer Bonding by Ar Beam Surface Activation

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Effect of Surface Roughness on Room-Temperature Wafer Bonding by Ar Beam Surface Activation

Call No. (NDL): Z53-A375
Bibliographic ID of National Diet Library: 4538242

Material type: 記事

Author: Hideki Takagiほか

Publisher: Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

Publication date: 1998-07

Material Format: Digital

Journal name: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 37(7) 1998.07

Publication Page: p.4197～4203

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Detailed bibliographic record

Summary, etc.：: Using Ar beam etching in vacuum, strong bonding of Si wafers is attained at room temperature. With appropriate etching time, the bonding occurs sponta...

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Material Type: 記事
Title: Effect of Surface Roughness on Room-Temperature Wafer Bonding by Ar Beam Surface Activation
Author/Editor: Hideki Takagi
Ryutaro Maeda
Teak Ryong Chung 他
Author Heading: Hideki Takagi
Ryutaro Maeda
Teak Ryong Chung
Periodical title: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue: 37(7) 1998.07
Volume: 37
Issue: 7
Pages: 4197～4203
Publication date of volume/issue (W3CDTF): 1998-07
ISSN (Periodical Title): 0021-4922
ISSN-L (Periodical Title): 0021-4922
Publication (Periodical Title): Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: ZM35
Target Audience: 一般
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌
https://dl.ndl.go.jp/collections/A00002
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象
Availability of remote photoduplication service: 可
Holding library: 国立国会図書館
Call No.: Z53-A375
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/11196198
https://dl.ndl.go.jp/pid/11196198
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4538242
http://id.ndl.go.jp/bib/4538242
Bibliographic Record Category (NDL): 632