極超真空用材料<TiN/ステンレス鋼>の真空特性

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Material Type: 記事
Title: 極超真空用材料<TiN/ステンレス鋼>の真空特性
Author/Editor: 池田佳直
斎藤一也
塚原園子他
Author Heading: 池田佳直
斎藤一也
塚原園子
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 41(5) 1998.05
Volume: 41
Issue: 5
Pages: 507～511
Publication date of volume/issue (W3CDTF): 1998-05
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4538949
http://id.ndl.go.jp/bib/4538949
Bibliographic Record Category (NDL): 632