イオンプレーティング法による窒化珪素薄膜の特性

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Material Type: 記事
Title: イオンプレーティング法による窒化珪素薄膜の特性
Author/Editor: 石川宏美
鈴木泰夫
蓮見薫
Author Heading: 石川宏美
鈴木泰夫
蓮見薫
Periodical title: 千葉県機械金属試験場研究報告
No. or year of volume/issue: (通号 27) 1998.08
Sequential issue number: 27
Pages: 29～36
Publication date of volume/issue (W3CDTF): 1998-08
ISSN (Periodical Title): 0289-0216
ISSN-L (Periodical Title): 0289-0216
Publication (Periodical Title): 千葉 : 千葉県機械金属試験場
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN11
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-851
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4545648
http://id.ndl.go.jp/bib/4545648
Bibliographic Record Category (NDL): 632