原子層のSi酸化膜を用いたナノ構造形成

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Material Type: 記事
Title: 原子層のSi酸化膜を用いたナノ構造形成
Author/Editor: 市川昌和
Author Heading: 市川昌和
Periodical title: まてりあ = Materia Japan
No. or year of volume/issue: 37(11) 1998.11
Volume: 37
Issue: 11
Pages: 931～937
Publication date of volume/issue (W3CDTF): 1998-11
ISSN (Periodical Title): 1340-2625
ISSN-L (Periodical Title): 1340-2625
Publication (Periodical Title): 仙台 : 日本金属学会 ; 1994-
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZP41
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z17-313
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4606295
http://id.ndl.go.jp/bib/4606295
Bibliographic Record Category (NDL): 632