MASCOT:Mask Pattern Correction Tool Using Genetic Algorithm

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MASCOT:Mask Pattern Correction Tool Using Genetic Algorithm

Call No. (NDL)
Z53-A375
Bibliographic ID of National Diet Library
4637933
Material type
記事
Author
Tamae Harukiほか
Publisher
Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Publication date
1996-12
Material Format
Digital
Journal name
Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 35(12B) 1996.12
Publication Page
p.6374~6378
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Detailed bibliographic record

Summary, etc.:

We propose a new optical proximity correction (OPC) method using a polygonal mask model and a genetic algorithm (GA). With the polygonal mask model, o...

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Bibliographic Record

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Digital

Material Type
記事
Author/Editor
Tamae Haruki
Satoru Asai
Kenji Nakagawa
Periodical title
Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue
35(12B) 1996.12
Volume
35
Issue
12B
Pages
6374~6378
Publication date of volume/issue (W3CDTF)
1996-12