MASCOT:Mask Pattern Correction Tool Using Genetic Algorithm

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MASCOT:Mask Pattern Correction Tool Using Genetic Algorithm

Call No. (NDL): Z53-A375
Bibliographic ID of National Diet Library: 4637933

Material type: 記事

Author: Tamae Harukiほか

Publisher: Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

Publication date: 1996-12

Material Format: Digital

Journal name: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 35(12B) 1996.12

Publication Page: p.6374～6378

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Detailed bibliographic record

Summary, etc.：: We propose a new optical proximity correction (OPC) method using a polygonal mask model and a genetic algorithm (GA). With the polygonal mask model, o...

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Digital

Material Type: 記事
Title: MASCOT:Mask Pattern Correction Tool Using Genetic Algorithm
Author/Editor: Tamae Haruki
Satoru Asai
Kenji Nakagawa
Author Heading: Tamae Haruki
Satoru Asai
Kenji Nakagawa
Periodical title: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue: 35(12B) 1996.12
Volume: 35
Issue: 12B
Pages: 6374～6378
Publication date of volume/issue (W3CDTF): 1996-12
ISSN (Periodical Title): 0021-4922
ISSN-L (Periodical Title): 0021-4922
Publication (Periodical Title): Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: ZM35
Target Audience: 一般
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌
https://dl.ndl.go.jp/collections/A00002
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象
Availability of remote photoduplication service: 可
Holding library: 国立国会図書館
Call No.: Z53-A375
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/11196187
https://dl.ndl.go.jp/pid/11196187
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4637933
http://id.ndl.go.jp/bib/4637933
Bibliographic Record Category (NDL): 632