Jump to main content

雑誌広島工業大学研究紀要
Volume number33
Article高周波-直流結合形マ...

高周波-直流結合形マグネトロンスパッタリング法による Ta/ITO構造のX線光電子分光法による評価

Icons representing 記事

Available with Digitized Contents Transmission Service

Find on the publisher's website

NDL Digital Collections

Available for viewing via the Digitized Contents Transmission Service for Individuals to official registered users of the NDL, who resides in Japan.

Become an official registered user >

Log in >

高周波-直流結合形マグネトロンスパッタリング法による Ta/ITO構造のX線光電子分光法による評価

Call No. (NDL)
Z14-307
Bibliographic ID of National Diet Library
4645962
Material type
記事
Author
田中 武ほか
Publisher
広島 : 広島工業大学
Publication date
1999-02
Material Format
Digital
Journal name
広島工業大学研究紀要 (通号 33) 1999.02
Publication Page
p.11～14
View All

Holdings of Libraries in Japan

This page shows libraries in Japan other than the National Diet Library that hold the material.

List of Cooperating Institutions and Databases

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

  • CiNii Research

    Search Service
    Paper
    You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
    Check the holdings of this book

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Digital

Material Type
記事
Title
高周波-直流結合形マグネトロンスパッタリング法による Ta/ITO構造のX線光電子分光法による評価
Author/Editor
田中 武
川畑 敬志
Author Heading
田中 武
川畑 敬志
Periodical title
広島工業大学研究紀要
No. or year of volume/issue
(通号 33) 1999.02
Sequential issue number
33
Pages
11～14
Publication date of volume/issue (W3CDTF)
1999-02
ISSN (Periodical Title)
0385-1672