雑誌電子情報通信学会論文誌 C-2 エレクトロニクス
Volume number82巻2号(通号122) 1999年2月
ArticleギガビットULSIに...

ギガビットULSIに向けた極薄シリコン酸窒化膜

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ギガビットULSIに向けた極薄シリコン酸窒化膜

Call No. (NDL)
Z16-1852
Bibliographic ID of National Diet Library
4664132
Material type
記事
Author
福田 永
Publisher
東京 : 電子情報通信学会エレクトロニクス ソサイエティ
Publication date
1999-02
Material Format
Paper
Journal name
電子情報通信学会論文誌. C-2, エレクトロニクス. 2, 電子素子・応用 = The Transactions of the Institute of Electronics, Information and Communication Engineers. C-2 / 電子情報通信学会 編 82(2) (通号 122) 1999.02
Publication Page
p.49～55
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Paper

Material Type
記事
Title
ギガビットULSIに向けた極薄シリコン酸窒化膜
Author/Editor
福田 永
Author Heading
福田 永
Periodical title
電子情報通信学会論文誌. C-2, エレクトロニクス. 2, 電子素子・応用 = The Transactions of the Institute of Electronics, Information and Communication Engineers. C-2 / 電子情報通信学会 編
No. or year of volume/issue
82(2) (通号 122) 1999.02
Volume
82
Issue
2
Sequential issue number
122
Pages
49～55