クリーンルーム関連規格の国際的統一化への動き--ISO/TC209における国際規格作成作業とその概要(特集次世代半導体製造環境に向けて)

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Material Type: 記事
Title: クリーンルーム関連規格の国際的統一化への動き--ISO/TC209における国際規格作成作業とその概要
Author/Editor: 藤井修二
諏訪好英
Series Title: 特集次世代半導体製造環境に向けて
Author Heading: 藤井修二
諏訪好英
Periodical title: エアロゾル研究 / 日本エアロゾル学会編集事務局編
No. or year of volume/issue: 14(1) (通号 53) 1999.03
Volume: 14
Issue: 1
Sequential issue number: 53
Pages: 27～32
Publication date of volume/issue (W3CDTF): 1999-03
ISSN (Periodical Title): 0912-2834
ISSN-L (Periodical Title): 0912-2834
Publication (Periodical Title): 東京 : 日本エアロゾル学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZP5
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z17-1062
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4685552
http://id.ndl.go.jp/bib/4685552
Bibliographic Record Category (NDL): 632