ダイヤモンド薄膜のキャリヤ移動度で世界最高--電子デバイス用ダイヤモンド薄膜の開発さらに前進
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- Material Type
- 記事
- Author/Editor
- 大串 秀世竹内 大輔山中 貞則 他
- Periodical title
- 電総研ニュース = ETL news / 工業技術院電子技術総合研究所 編
- No. or year of volume/issue
- (通号 590) 1999.03
- Sequential issue number
- 590
- Pages
- 5～9
- Publication date of volume/issue (W3CDTF)
- 1999-03
- ISSN (Periodical Title)
- 0011-846X