Improved Electron-Beam/Deep-Ultraviolet Intralevel Mix-and-Match Lithography with 100nm Resolution

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CiNii Research

Improved Electron-Beam/Deep-Ultraviolet Intralevel Mix-and-Match Lithography with 100nm Resolution

Call No. (NDL): Z53-A375
Bibliographic ID of National Diet Library: 4713268

Material type: 記事

Author: Shunko Magoshiほか

Publisher: Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

Publication date: 1999-04

Material Format: Digital

Journal name: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 38(4A) (通号 497) 1999.04

Publication Page: p.2169～2172

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Detailed bibliographic record

Summary, etc.：: We have developed a novel electron-beam (e-beam)/deep-ultraviolet (DUV) intralevel mix-and-match (ILM&M) lithography as a production-viable technology...

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Digital

Material Type: 記事
Title: Improved Electron-Beam/Deep-Ultraviolet Intralevel Mix-and-Match Lithography with 100nm Resolution
Author/Editor: Shunko Magoshi
Hiromi Niiyama
Shinji Sato 他
Author Heading: Shunko Magoshi
Hiromi Niiyama
Shinji Sato
Periodical title: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue: 38(4A) (通号 497) 1999.04
Volume: 38
Issue: 4A
Sequential issue number: 497
Pages: 2169～2172
Publication date of volume/issue (W3CDTF): 1999-04
ISSN (Periodical Title): 0021-4922
ISSN-L (Periodical Title): 0021-4922
Publication (Periodical Title): Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: ZM35
Target Audience: 一般
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌
https://dl.ndl.go.jp/collections/A00002
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象
Availability of remote photoduplication service: 可
Holding library: 国立国会図書館
Call No.: Z53-A375
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/11226585
https://dl.ndl.go.jp/pid/11226585
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4713268
http://id.ndl.go.jp/bib/4713268
Bibliographic Record Category (NDL): 632