シリコン結晶中の点欠陥形成に対する不純物原子の応力効果

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Material Type: 記事
Title: シリコン結晶中の点欠陥形成に対する不純物原子の応力効果
Author/Editor: 菊池通真
井上直久
棚橋克人
Author Heading: 菊池通真
井上直久
棚橋克人
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 42(3) 1999.03
Volume: 42
Issue: 3
Pages: 349～352
Publication date of volume/issue (W3CDTF): 1999-03
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4716333
http://id.ndl.go.jp/bib/4716333
Bibliographic Record Category (NDL): 632