ラングミューアプローブ法と発光分光法による電子サイクロトロン共鳴メタンプラズマの測定

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Material Type: 記事
Title: ラングミューアプローブ法と発光分光法による電子サイクロトロン共鳴メタンプラズマの測定
Author/Editor: 稲葉宏
藤巻成彦
Author Heading: 稲葉宏
藤巻成彦
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 42(5) 1999.05
Volume: 42
Issue: 5
Pages: 565～571
Publication date of volume/issue (W3CDTF): 1999-05
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4761211
http://id.ndl.go.jp/bib/4761211
Bibliographic Record Category (NDL): 632