低温熱処理におけるボロンの初期異常拡散

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低温熱処理におけるボロンの初期異常拡散

Call No. (NDL)
Z16-1852
Bibliographic ID of National Diet Library
4836843
Material type
記事
Author
斎藤 朋也ほか
Publisher
東京 : 電子情報通信学会エレクトロニクス ソサイエティ
Publication date
1999-08
Material Format
Paper
Journal name
電子情報通信学会論文誌. C-2, エレクトロニクス. 2, 電子素子・応用 = The Transactions of the Institute of Electronics, Information and Communication Engineers. C-2 / 電子情報通信学会 編 82(8) (通号 128) 1999.08
Publication Page
p.446~450
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Paper

Material Type
記事
Author/Editor
斎藤 朋也
夏 建新
金 良守 他
Periodical title
電子情報通信学会論文誌. C-2, エレクトロニクス. 2, 電子素子・応用 = The Transactions of the Institute of Electronics, Information and Communication Engineers. C-2 / 電子情報通信学会 編
No. or year of volume/issue
82(8) (通号 128) 1999.08
Volume
82
Issue
8
Sequential issue number
128
Pages
446~450