特集解説 原子間力顕微鏡による原子レベルの物性評価と計測 (特集:電子材料ナノメータ領域評価技術)

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特集解説 原子間力顕微鏡による原子レベルの物性評価と計測

(特集:電子材料ナノメータ領域評価技術)

Call No. (NDL)
Z16-795
Bibliographic ID of National Diet Library
4866247
Material type
記事
Author
森田 清三ほか
Publisher
東京 : 電気学会
Publication date
1999-10
Material Format
Paper
Journal name
電気学会論文誌. C, 電子・情報・システム部門誌 = IEEJ transactions on electronics, information and systems 119(10) 1999.10
Publication Page
p.1109~1112
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Paper

Material Type
記事
Author/Editor
森田 清三
菅原 康弘
Periodical title
電気学会論文誌. C, 電子・情報・システム部門誌 = IEEJ transactions on electronics, information and systems
No. or year of volume/issue
119(10) 1999.10
Volume
119
Issue
10
Pages
1109~1112