(3)超硬質TiN膜...

(3)超硬質TiN膜の特性と応用 (特集 窒素化合物のもたらす新素材)

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(3)超硬質TiN膜の特性と応用(特集 窒素化合物のもたらす新素材)

Call No. (NDL)
Z16-177
Bibliographic ID of National Diet Library
4923982
Material type
記事
Author
長坂 浩志
Publisher
東京 : 電気学会
Publication date
1999-12
Material Format
Paper
Journal name
電気学会誌 = The journal of the Institute of Electrical Engineers of Japan 119(12) 1999.12
Publication Page
p.749~751
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Paper Digital

Material Type
記事
Author/Editor
長坂 浩志
Author Heading
Periodical title
電気学会誌 = The journal of the Institute of Electrical Engineers of Japan
No. or year of volume/issue
119(12) 1999.12
Volume
119
Issue
12
Pages
749~751