極薄シリコン酸化膜の新しい作製手法の開発--超高密度記録素子作製に向けた大きな一歩
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- Material Type
- 記事
- Author/Editor
- 黒河 明一村 信吾中村 健 他
- Periodical title
- 電総研ニュース = ETL news / 工業技術院電子技術総合研究所 編
- No. or year of volume/issue
- (通号 600) 2000.01
- Sequential issue number
- 600
- Pages
- 10～12
- Publication date of volume/issue (W3CDTF)
- 2000-01
- ISSN (Periodical Title)
- 0011-846X