Volume number63(8/9)
X線トポグラフィーに...

X線トポグラフィーによるSiC単結晶成長その場観察装置の開発

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X線トポグラフィーによるSiC単結晶成長その場観察装置の開発

Call No. (NDL)
Z16-185
Bibliographic ID of National Diet Library
4964622
Material type
記事
Author
西澤 伸一ほか
Publisher
つくば : 電子技術総合研究所
Publication date
1999-09
Material Format
Digital
Journal name
電子技術総合研究所彙報 / 電子技術総合研究所 編 63(8・9) 1999.09
Publication Page
p.305~310
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Digital

Material Type
記事
Author/Editor
西澤 伸一
山口 博隆
加藤 智久 他
Periodical title
電子技術総合研究所彙報 / 電子技術総合研究所 編
No. or year of volume/issue
63(8・9) 1999.09
Volume
63
Issue
8・9
Pages
305~310
Publication date of volume/issue (W3CDTF)
1999-09