半導体の電子ビームドーピングにおける表面拡散

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Material Type: 記事
Title: 半導体の電子ビームドーピングにおける表面拡散
Author/Editor: 和田隆夫
藤本博
浅見護他
Author Heading: 和田隆夫
藤本博
浅見護
Periodical title: 大同工業大学紀要 / 大同工業大学研究・産学連携支援室編
No. or year of volume/issue: (通号 35) 1999
Sequential issue number: 35
Pages: 141～144
Publication date of volume/issue (W3CDTF): 1999
ISSN (Periodical Title): 0285-5372
ISSN-L (Periodical Title): 0285-5372
Publication (Periodical Title): 名古屋 : 大同工業大学研究・産学連携支援室
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZV1
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z22-49
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4966172
http://id.ndl.go.jp/bib/4966172
Bibliographic Record Category (NDL): 632