Highly Accurate Composition Analysis of(Pb,Zr)TiO3 Using a Scanning Electron Microscope/Energy Dispersive X-Ray Spectrometer

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Highly Accurate Composition Analysis of(Pb,Zr)TiO3 Using a Scanning Electron Microscope/Energy Dispersive X-Ray Spectrometer

Call No. (NDL)
Z53-A375
Bibliographic ID of National Diet Library
4975062
Material type
記事
Author
Mitsuo Sugaほか
Publisher
Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Publication date
2000-01
Material Format
Digital
Journal name
Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 39(1) (通号 512) 2000.01
Publication Page
p.316~319
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Detailed bibliographic record

Summary, etc.:

A highly accurate composition analysis method for (Pb,Zr)TiO<FONT SIZE="-1"><SUB>3</SUB></FONT> (PZT) thin films was developed that uses a scanning el...

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Bibliographic Record

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Digital

Material Type
記事
Author/Editor
Mitsuo Suga
Kazuyoshi Torii
Takashi Kumihashi 他
Periodical title
Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue
39(1) (通号 512) 2000.01
Volume
39
Issue
1
Sequential issue number
512
Pages
316~319