Characterization of Residues on Anhydrous HF Gas-Phase Etching of Sacrificial Oxides for Surface Micromachining

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Characterization of Residues on Anhydrous HF Gas-Phase Etching of Sacrificial Oxides for Surface Micromachining

Call No. (NDL): Z53-A375
Bibliographic ID of National Diet Library: 4975096

Material type: 記事

Author: Won Ick Jangほか

Publisher: Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

Publication date: 2000-01

Material Format: Digital

Journal name: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 39(1) (通号 512) 2000.01

Publication Page: p.337～342

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Summary, etc.：: We employed a newly developed anhydrous HF gas-phase etching (GPE) process for the removal of sacrificial oxides. The structural layers are P-doped mu...

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Material Type: 記事
Title: Characterization of Residues on Anhydrous HF Gas-Phase Etching of Sacrificial Oxides for Surface Micromachining
Author/Editor: Won Ick Jang
Chang Auck Choi
Jong Hyun Lee 他
Author Heading: Won Ick Jang
Chang Auck Choi
Jong Hyun Lee
Periodical title: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue: 39(1) (通号 512) 2000.01
Volume: 39
Issue: 1
Sequential issue number: 512
Pages: 337～342
Publication date of volume/issue (W3CDTF): 2000-01
ISSN (Periodical Title): 0021-4922
ISSN-L (Periodical Title): 0021-4922
Publication (Periodical Title): Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: ZM35
Target Audience: 一般
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌
https://dl.ndl.go.jp/collections/A00002
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象
Availability of remote photoduplication service: 可
Holding library: 国立国会図書館
Call No.: Z53-A375
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/11196214
https://dl.ndl.go.jp/pid/11196214
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4975096
http://id.ndl.go.jp/bib/4975096
Bibliographic Record Category (NDL): 632