走査型プローブ顕微鏡を用いたナノメーターオーダの計測 (ミニ特集 表面/ナノ構造の計測)

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走査型プローブ顕微鏡を用いたナノメーターオーダの計測

(ミニ特集 表面/ナノ構造の計測)

Call No. (NDL)
Z14-106
Bibliographic ID of National Diet Library
4977082
Material type
記事
Author
安武 正敏
Publisher
東京 : 計測自動制御学会 ; 1962-
Publication date
1999-12
Material Format
Paper
Journal name
計測と制御 : journal of the Society of Instrument and Control Engineers 38(12) 1999.12
Publication Page
p.769~775
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Paper

Material Type
記事
Author/Editor
安武 正敏
Author Heading
Periodical title
計測と制御 : journal of the Society of Instrument and Control Engineers
No. or year of volume/issue
38(12) 1999.12
Volume
38
Issue
12
Pages
769~775