Early Increase in Resistance during Electlomigration in AlCu-plugged Via Structures
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- Material Type
- 記事
- Author/Editor
- Kazuhiro Hoshino
- Author Heading
- Periodical title
- Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
- No. or year of volume/issue
- 39(3A) (通号 515) 2000.03
- Volume
- 39
- Issue
- 3A
- Sequential issue number
- 515
- Pages
- 994～998