光放射圧を利用した微粒子操作によるマイクロ加工に関する基礎的研究
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- Material Type
- 記事
- Author/Editor
- 清水 浩貴三好 隆志高谷 裕浩 他
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 66(6) (通号 786) 2000.06
- Volume
- 66
- Issue
- 6
- Sequential issue number
- 786
- Pages
- 901～906