ラジカルビーム源を用いたパルスレーザー堆積法による窒化炭素薄膜の合成と評価(第40回真空に関する連合講演会プロシーディングス)

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Material Type: 記事
Title: ラジカルビーム源を用いたパルスレーザー堆積法による窒化炭素薄膜の合成と評価
Author/Editor: 小野光治郎
櫻田国士
青井芳史他
Series Title: 第40回真空に関する連合講演会プロシーディングス
Author Heading: 小野光治郎
櫻田国士
青井芳史
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 43(3) 2000.03
Volume: 43
Issue: 3
Pages: 273～276
Publication date of volume/issue (W3CDTF): 2000-03
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 5360974
http://id.ndl.go.jp/bib/5360974
Bibliographic Record Category (NDL): 632