特集 マイクロマシンにおける計測技術

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特集 マイクロマシンにおける計測技術

Call No. (NDL)
Z16-B380
Bibliographic ID of National Diet Library
5429604
Material type
記事
Author
-
Publisher
東京 : 電気学会
Publication date
2000
Material Format
Paper
Journal name
電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines 120(8・9) 2000.8・9
Publication Page
p.381~391
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Paper

Material Type
記事
Periodical title
電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
No. or year of volume/issue
120(8・9) 2000.8・9
Volume
120
Issue
8・9
Pages
381~391
Publication date of volume/issue (W3CDTF)
2000
ISSN (Periodical Title)
1341-8939
ISSN-L (Periodical Title)
1341-8939