Hydrogen Effect on Damage Structure of Si(100) Surface Studied by in Situ Raman Spectroscopy
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- Material Type
- 記事
- Author/Editor
- Takanobu HaraTomoko YoshidaTetsuo Tanabe 他
- Author Heading
- Periodical title
- Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
- No. or year of volume/issue
- 39(7B) (通号 524) 2000.7
- Volume
- 39
- Issue
- 7B
- Sequential issue number
- 524
- Pages
- 4427～4431