原子間力顕微鏡一体型加工評価装置の開発(3)加工特性の分子動力学解析

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原子間力顕微鏡一体型加工評価装置の開発(3)加工特性の分子動力学解析

Call No. (NDL)
Z16-1147
Bibliographic ID of National Diet Library
5463029
Material type
記事
Author
佐々木 源ほか
Publisher
東京 : 砥粒加工学会
Publication date
2000-09
Material Format
Paper
Journal name
Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology 44(9) (通号 217) 2000.9
Publication Page
p.396~401
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Paper

Material Type
記事
Author/Editor
佐々木 源
森田 昇
吉田 嘉太郎 他
Periodical title
Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology
No. or year of volume/issue
44(9) (通号 217) 2000.9
Volume
44
Issue
9
Sequential issue number
217
Pages
396~401