シリコン表面窒化用活性窒素フロー装置の開発

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Material Type: 記事
Title: シリコン表面窒化用活性窒素フロー装置の開発
Author/Editor: 辻正治
濱上太郎
田中敦他
Author Heading: 辻正治
濱上太郎
田中敦
Periodical title: 九州大学機能物質科学研究所報告 / 九州大学機能物質科学研究所編
No. or year of volume/issue: 14(1) 2000.07
Volume: 14
Issue: 1
Pages: 11～15
Publication date of volume/issue (W3CDTF): 2000-07
ISSN (Periodical Title): 0914-3793
ISSN-L (Periodical Title): 0914-3793
Publication (Periodical Title): 春日 : 九州大学機能物質科学研究所
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM2
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z14-1380
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 5466519
http://id.ndl.go.jp/bib/5466519
Bibliographic Record Category (NDL): 632